Passivation and High-k thin films
CMOS & PowerIC
New materials and processes are the key for the next nodes in CMOS and PowerIC. Solmates' pulsed laser deposition enables new generation Piezo FinFETS; electrical passivation and high-k layers of various materials with low temperature process.
Please contact us for folders, flyers and/or tailored advice.
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Passivation & High-k layers |
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| - | Dense layers at low process temperatures |
| - | Various materials (Al2O3, HfO, ZrO2) |
| - | Ultra low damage deposition |
| - | Various materials/compounds |
| - | Fast deposition deposition speeds |
| Low temperature dense Al2O3 |
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PZT for strained FinFETs |
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| - | PZT deposition on TiN/FinFET |
| - | No post anneal required |
| - | Covering 3D structures |
| Piezo FinFET |
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