• Solmates
  • Solmates
  • Solmates

Passivation and High-k thin films

CMOS & PowerIC

New materials and processes are the key for the next nodes in CMOS and PowerIC. Solmates' pulsed laser deposition enables new generation Piezo FinFETS; electrical passivation and high-k layers of various materials with low temperature process.

Please contact us for folders, flyers and/or tailored advice.


Passivation & High-k layers

- Dense layers at low process temperatures
- Various materials (Al2O3, HfO, ZrO2)
- Ultra low damage deposition
- Various materials/compounds
- Fast deposition deposition speeds
Low temperature dense Al2O3



PZT for strained FinFETs

- PZT deposition on TiN/FinFET
- No post anneal required
- Covering 3D structures
Piezo FinFET