The Innovation to Industrialisation for Advanced Micro- and Nanosystems (I2I) project has been granted for subsidies from EFRO. Part of the I2I project comprises the project Ultrasound MEMS technology, with SolMateS, Solutions-on-Silicon, University Twente as partners and lead by NovioMEMS. Based on the thin film piezo-electric technology of SolMateS an industrial process flow will be developed with NovioMEMS. The university Twente offers expertise and Solutions-on-Silicon BV is the consultant for the design of cleanroom equipment, as they build on extensive expertise in re-furbishment, trade and maintenance of cleanroom equipment. The I2I project has been submitted by Business Cluster Semiconductors East-Netherlands (BCS) and will run three years, starting January 2012.