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PLD towards main stream deposition technology

History of Solmates


2018 Solmates secures series B investment from strategic partner
Solmates secures series B funding from a leading global semiconductor company and its existing investors Twente Technology Fund and Oost NL, enabling Solmates to accelerate their technology towards the high-volume production market. Solmates installs its second tool in China enabling a micro-OLED display company to speed up their development.


2017 Solmates opens the doors of its new headquarters 
The release of the SMP 800 line, with the installation of two reactors at EPFL, enables customers of Solmates to perform large area PLD on a new compact platform. Solmates installs its first system outside of Europe, enabling panel production for OLED applications at CSOT. At the end of the year the Solmates headquarters are moved to a new location with brand-new demo cleanroom and production facilities. 


2016 Solmates continues to expand its installed base in Europe
Solmates secures a key order for its PLD equipment from leading nanoelectronics research center imec in Belgium. The HAMLET consortium (H2020) starts development of optical switches using Solmates’ PZT layers for 5G applications. 


2015 Integration of PLD processes in applications
Customers of Solmates demonstrate integration of several PLD processes in demo applications, like gas sensors, micromirrors, LED chips and optical switches. Solmates shows that lead-free Piezomaterial is a real alternative for the standardly used PZT.


2014 Solmates expands process portfolio
Solmates develops additional processes with unique features. Like the patented damage free, room temperature deposition of ITO on OLED, enabling a full transparent OLED. Other key processes for LED, PowerIC are further developed and tested with launching customers.


2013 Solmates enters the market with tool placement
Solmates sells and successfully installs two fully integrated PLD systems, one to SINTEF and one to Robert Bosch Gerlingen. Both systems have passed final acceptance.


2012 Solmates continues to further improve its hardware and processes
Critical aspects of the technology are further optimized. Solmates enters into high impact MEMS projects with European partners. 


2011 Dedicated third-generation turnkey system for PZT thin films
Solmates acquires investments from venture capital companies TTF and PPM Oost to accelerate market launch of the SIP 1200 turnkey deposition equipment. The first Solmates tool was delivered at the end of 2010 to the High Tech Factory. This fully automated system is able to produce PZT thin films on 6" and 8" wafers. And has a unique feature that it strongly reduces droplets or so-called particulates from reaching on the wafer surface. 


2010 Piezo MEMS wafer services for customers in Europe, Asia and USA
Solmates starts to sell 4" and 6" wafers with PZT to corporate R&D, Research Institutes and University groups. Solmates assists several customers with fabrication and characterization of piezo-MEMS devices. Customers value the high stable PZT performance, while keeping excellent composition control. Wafers with our PZT thin films show world record displacement values and a minimal spread over the wafer area. Solmates initiates the design of the SIP 1200 with authoritative Dutch and German partners in the semiconductor industry.


2009 second-generation high-temperature prototype system
Solmates maps and explores market needs for piezoelectric PbZrTiOx (PZT), doped transparent conducting oxides and hydroxyapatite thin films (for medical implants). These thin films are typically deposited at elevated temperatures. To deposit these materials on an industrial scale, a second-generation system is designed in 2009.


2008 A new industrial deposition platform is born
Scaling up to a 200mm pulsed laser deposition system is thought to be impossible. However, since 2008 polymer lenses have been coated in-house by Solmates. Solmates has the ability to develop this system due to its roots in the academic groups of Prof. Blank, Prof. Horst Rogalla and Prof.Rijnders at the MESA+ institute for Nanotechnology in Europe.


2007 Anti-Reflective coatings on polymer optics
Soon after the start, Solmates is challenged to apply special anti-reflective coating for a military head-up display system. The company succeeds in coating a polymer lens with laser deposition on a 10x10mm scale and starts to pioneer with a deposition platform based on laser deposition.


From consultancy for Dutch SME's to turnkey equipment for the MEMS market
In February 2007 Solmates starts offering material-science-related services. The company offered consultancy services and worked for more than 100 Dutch SME's from 2006-2009.