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Analysis of thin-film PZT/LNO stacks on an encapsulated TiN electrode

The MESA+ institute of Nanotechnology in collaboration with NXP and Solmates  has demonstrated functional MFM capacitors where the PZT was deposited with Solmates PLD on TiN (instead of Pt)

B. Kaleli , M.D. Nguyen, J. Schmitz , R.A.M. Wolters and R.J.E. Hueting.

To read the full article go to Science Direct.