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Passivation and High-k thin films

CMOS & PowerIC

New materials and processes are the key for the next nodes in CMOS and PowerIC. Solmates' pulsed laser deposition enables new generation Piezo FinFETS; electrical passivation and high-k layers of various materials with low temperature process.

Please contact us for folders, flyers and/or tailored advice.

 

Passivation & High-k layers

- Dense layers at low process temperatures
- Various materials (Al2O3, HfO, ZrO2)
- Ultra low damage deposition
- Various materials/compounds
- Fast deposition deposition speeds
Low temperature dense Al2O3







 


 

PZT for strained FinFETs

- PZT deposition on TiN/FinFET
- No post anneal required
- Covering 3D structures
Piezo FinFET