New materials and processes are the key for the next nodes in CMOS and PowerIC. Solmates' pulsed laser deposition enables new generation Piezo FinFETS; electrical passivation and high-k layers of various materials with low temperature process.
Please contact us for folders, flyers and/or tailored advice.
Passivation & High-k layers
|-||Dense layers at low process temperatures|
|-||Various materials (Al2O3, HfO, ZrO2)|
|-||Ultra low damage deposition|
|-||Fast deposition deposition speeds|
|Low temperature dense Al2O3|
PZT for strained FinFETs
|-||PZT deposition on TiN/FinFET|
|-||No post anneal required|
|-||Covering 3D structures|